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Groove design of vacuum chucks for hot embossing lithography

✍ Scribed by L. Bendfeldt; H. Schulz; N. Roos; H.-C. Scheer

Book ID: 114155407
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 427 KB
Volume: 61-62
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00473-2

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