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Choice of the molecular weight of an imprint polymer for hot embossing lithography

✍ Scribed by H. Schulz; M. Wissen; N. Bogdanski; H.-C. Scheer; K. Mattes; Ch. Friedrich

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 379 KB
Volume: 78-79
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.12.079

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