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Glow-discharge optical spectroscopy for the analysis of thin films

✍ Scribed by Greene, J. E.


Book ID
120475427
Publisher
American Institute of Physics
Year
1973
Tongue
English
Weight
600 KB
Volume
44
Category
Article
ISSN
0021-8979

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## Abstract Depth profiles of nickel thin films on silicon obtained with a Grimm glow discharge lamp operating at various conditions were compared. The best conditions for the profile analysis are: high argon pressure, high discharge current and low discharge voltage. The signal response at the int