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Global performance evaluation of various on-chip square spiral inductors on GaAs substrates

✍ Scribed by Yin, W.Y.; Pan, S.J.; Gan, Y.B.; Li, L.W.; Ooi, B.L.

Book ID
114447883
Publisher
The Institution of Electrical Engineers
Year
2003
Tongue
English
Weight
292 KB
Volume
150
Category
Article
ISSN
1350-2409

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Spiral inductors ha¨e been e¨aluated on Si substrates by inserting a porous Si layer for the application of MMICs. This high-resis-ti¨e porous Si layer pro¨ides a low substrate loss and a low coupling effect. Spiral inductors fabricated on this layer achie¨e better Q-and inductance ¨alues. A 9.7 nH