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Ge/Si interdiffusion in the GeSi dots and wetting layers

✍ Scribed by Wan, J.; Luo, Y. H.; Jiang, Z. M.; Jin, G.; Liu, J. L.; Wang, Kang L.; Liao, X. Z.; Zou, J.


Book ID
120487835
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
404 KB
Volume
90
Category
Article
ISSN
0021-8979

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Wetting layer formation in superlattices
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The influence of parameters of germanium deposition on wetting layer thickness was studied during the growth on the Si(1 0 0) surface. A non-monotone dependence of the thickness on growth temperature was discovered and accounted for by changing the mechanism of the layer-by-layer growth. The conclus