Generation of optical contrast in insulating materials by irradiation with focused ion beams
β Scribed by S. Kalbitzer
- Publisher
- Springer
- Year
- 2000
- Tongue
- English
- Weight
- 149 KB
- Volume
- 71
- Category
- Article
- ISSN
- 1432-0630
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The diffractive optical element (DOES) with continuous relief and submicron feature size is very useful for optical fibre communication due to its perfect coupling. Microfabrication of the DOES by focused ion beam (FIB) technology is introduced in detail in this paper. Based on analyzing influencing
The fabrication of high-aspect-ratio submicron-to-nanometer range microstructures in LiNbO using a state-of-the-art Schlum-3 ( ) berger AMS 3000 focused ion-beam FIB system is presented. The submicron structures with about 350 nm width and 1600 nm depth are fabricated by employing XeF gas-assisted g