✦ LIBER ✦

Generation of large-area disk-shaped ECR plasma for diamond deposition

✍ Scribed by Akira Murai; Izumi Ohya; Toshiaki Yasui; Hirokazu Tahara; Takao Yoshikawa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Generation of pulsed direct-current plas

✍ Lee, W.-S.; Chae, K.-W.; Eun, K.Y.; Baik, Y.-J. 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 376 KB

Deposition of large area amorphous silic

✍ Y Ueda; Y Inoue; S Shinohara; Y Kawai 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 436 KB

Linear antenna microwave plasma CVD depo

✍ A. Kromka; O. Babchenko; T. Izak; K. Hruska; B. Rezek 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 826 KB

Deposition of large-area, high-quality c

✍ W.J. Zhang; C.Y. Chan; K.M. Chan; I. Bello; Y. Lifshitz; S.T. Lee 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 245 KB

High pressure high power microwave plasm

✍ H.A Naseem; M.S Haque; M.A Khan; A.P Malshe; W.D Brown 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 584 KB

Large-area surface wave plasmas using mi

✍ Kim, J; Tsugawa, K; Ishihara, M; Koga, Y; Hasegawa, M 📂 Article 📅 2009 🏛 Institute of Physics 🌐 English ⚖ 573 KB