Generation of pulsed direct-current plasma above 100 torr for large area diamond deposition

✍ Scribed by Lee, W.-S.; Chae, K.-W.; Eun, K.Y.; Baik, Y.-J.

• Book ID: 122525143
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 376 KB
• Volume: 10
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(01)00511-8