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Gas phase reactivity in chemical vapor deposition

โœ Scribed by F. Teyssandier; Y.B. Wang


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
798 KB
Volume
76-77
Category
Article
ISSN
0257-8972

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โœ Cui-ying Lu; Lai-fei Cheng; Li-tong Zhang; Chun-nian Zhao ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 38 KB

instead of the commonly-used alkaline-acid method. The process parameters were optimized. Results showed that the fixed carbon mass fraction achieved by this method could be as high as 99.9% under the optimal conditions while that by the alkaline-acid method was only 85.8%, indicating that the alkal