✦ LIBER ✦
Chemical reactivity and gas flow dynamics considerations on atmospheric pressure chemical vapor deposition with silane precursor
✍ Scribed by G. Jursich; K. Mulderink; W. Von Drasek
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 502 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0921-5107
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