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Gas-phase reactions of SF5, SF2, and SOF with O(3P): Their significance in plasma processing

✍ Scribed by I. C. Plumb; K. R. Ryan

Publisher: Springer
Year: 1986
Tongue: English
Weight: 532 KB
Volume: 6
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf00575131

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📜 SIMILAR VOLUMES

Gas-phase combination reactions of SF4an

Gas-phase combination reactions of SF4and SF5with F in plasmas of SF6

✍ K. R. Ryan; I. C. Plumb 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 567 KB

Gas-phase reactions of CF2with O(3P) to

Gas-phase reactions of CF2with O(3P) to produce COF: Their significance in plasma processing

✍ K. R. Ryan; I. C. Plumb 📂 Article 📅 1984 🏛 Springer 🌐 English ⚖ 529 KB

Gas-phase reactions in plasmas of SF6wit

Gas-phase reactions in plasmas of SF6with O2in He

✍ K. R. Ryan; I. C. Plumb 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 916 KB

Gas-phase reactions of CF3and CF2with hy

Gas-phase reactions of CF3and CF2with hydrogen atoms: Their significance in plasma processing

✍ K. R. Ryan; I. C. Plumb 📂 Article 📅 1984 🏛 Springer 🌐 English ⚖ 230 KB

Gas-phase reactions of CF3and CF2with at

Gas-phase reactions of CF3and CF2with atomic and molecular fluorine: Their significance in plasma etching

✍ I. C. Plumb; K. R. Ryan 📂 Article 📅 1986 🏛 Springer 🌐 English ⚖ 599 KB

Kinetics of the gas-phase reactions of t

Kinetics of the gas-phase reactions of the OH radical with (C2H5)3PO and (CH3O)2P(S)Cl at 296 ± 2 K

✍ Roger Atkinson; Sara M. Aschmann; Mark A. Goodman; Arthur M. Winer 📂 Article 📅 1988 🏛 John Wiley and Sons 🌐 English ⚖ 470 KB

The kinetics of the gas-phase reactions of the OH radical with (C,H,O),PO and (CH30)2P(S)C1 and of the reactions of NO, radicals and O3 with (CH,O),P(S)Cl have been studied at room temperature. Using a relative rate technique, the rate constants determined for the reactions of the OH radical with (C