This patent describes a seal that is designed to have excellent plasma resistance and sealing, and can prevent an O-ring from being extruded into a gap on the vacuum side. A plasma-resistant seal of PTFE ( 6) is fitted between an O-ring (5) and the plasma radiation. The Oring works as the main seal,
โฆ LIBER โฆ
Gas bearings for Compressors
โ Scribed by S. V. Pinegin; L. G. Stepanyants; G. A. Pospelov
- Publisher
- Springer
- Year
- 1974
- Tongue
- English
- Weight
- 127 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0009-2355
No coin nor oath required. For personal study only.
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