✦ LIBER ✦

Compressor seal assembly and gas bearing cartridge

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 240 KB
Volume: 2004
Category: Article
ISSN: 1350-4789
DOI: 10.1016/s1350-4789(04)00309-5

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✦ Synopsis

This patent describes a seal that is designed to have excellent plasma resistance and sealing, and can prevent an O-ring from being extruded into a gap on the vacuum side. A plasma-resistant seal of PTFE ( 6) is fitted between an O-ring (5) and the plasma radiation. The Oring works as the main seal, and is made from a rubber-like elastic material. The plasma seal and the O-ring are provided as an assembly. There is an O-ring groove (3)

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