This patent describes a seal that is designed to have excellent plasma resistance and sealing, and can prevent an O-ring from being extruded into a gap on the vacuum side. A plasma-resistant seal of PTFE ( 6) is fitted between an O-ring (5) and the plasma radiation. The Oring works as the main seal,
โฆ LIBER โฆ
PTFE sealing and bearing components for compressors
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 180 KB
- Volume
- 1994
- Category
- Article
- ISSN
- 1350-4789
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Dynamic sealing ## Material designed for high thermalmechanical stresses A new material designed for high thermal-mechanical stresses has been introduced by Reinz-Dichtungs GmbH. The newly developed material features a strongly expanded metal mesh reinforcement with a layer of asbestos-free soft