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GaAs substrate pretreatment and metalorganic vapour phase epitaxy of GaAs, AlAs and (AlGa) As using β-eliminating trialkyl-As precursors

✍ Scribed by G. Zimmermann; Z. Spika; T. Marschner; B. Spill; W. Stolz; E.O. Göbel; P. Gimmnich; J. Lorberth; A. Greiling; A. Salzmann


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
758 KB
Volume
145
Category
Article
ISSN
0022-0248

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