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Fundamental aspects of low-temperature growth of microcrystalline silicon

✍ Scribed by Michio Kondo; Hiroyuki Fujiwara; Akihisa Matsuda

Book ID: 108388616
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 409 KB
Volume: 430
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(03)00093-2

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