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Fundamental processes of microcrystalline silicon film growth: a molecular dynamics study

✍ Scribed by Tatusya Ohira; Osamu Ukai; Matsuhei Noda

Book ID: 117214889
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 893 KB
Volume: 458
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(00)00447-7

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