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Fully scaled 0.5 μm MOS cicuits by synchroton X-ray lithography: Resist systems and line width control

✍ Scribed by D. Seeger; K. Kwietniak; D. Crockatt; A. Wilson; J. Warlaumont

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Fully scaled 0.5μm MOS circuits by synch

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Fully scaled 0.5 μm MOS circuits by sync

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