𝔖 Bobbio Scriptorium
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Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]

✍ Scribed by Kapels, H.; Aigner, R.; Binder, J.

Book ID
114538228
Publisher
IEEE
Year
2000
Tongue
English
Weight
168 KB
Volume
47
Category
Article
ISSN
0018-9383

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