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Formation of Vacancy-Impurity Complexes by Kinetic Processes in Highly As-Doped Si

✍ Scribed by Ranki, V.; Nissilä, J.; Saarinen, K.


Book ID
111860974
Publisher
The American Physical Society
Year
2002
Tongue
English
Weight
102 KB
Volume
88
Category
Article
ISSN
0031-9007

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