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Formation of ultra-thin continuous Pt and Al films by RF sputtering

✍ Scribed by M. Kawamura; T. Mashima; Y. Abe; K. Sasaki


Book ID
114085261
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
221 KB
Volume
377-378
Category
Article
ISSN
0040-6090

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