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Formation of amorphous AlCr and AlMn alloy films by rf sputtering

✍ Scribed by K. Masui; H. Nakamoto; S. Maruno; T. Kawaguchi; S. Sakakibara


Book ID
118334151
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
855 KB
Volume
124
Category
Article
ISSN
0022-3093

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