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Formation of silicon carbide and diamond nanoparticles in the surface layer of a silicon target during short-pulse carbon ion implantation

✍ Scribed by G. E. Remnev; Yu. F. Ivanov; E. P. Naiden; M. S. Saltymakov; A. V. Stepanov; V. F. Shtan’ko


Book ID
111448486
Publisher
Springer
Year
2009
Tongue
English
Weight
223 KB
Volume
54
Category
Article
ISSN
1063-7842

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