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Formation of self-assembled platinum particles on diamond and their embedding in diamond by microwave plasma chemical vapor depositions

✍ Scribed by Mitani, S.; Teraji, T.; Ito, T.


Book ID
122701440
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
536 KB
Volume
15
Category
Article
ISSN
0925-9635

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## Abstract In this work, we study the influence of oxygen additive in the gas phase on hydrogen impurity incorporation into thick nanocrystalline diamond (NCD) films. Various diamond samples were grown on large silicon wafers of 5.08 cm diameter by adjusting the amount of oxygen and nitrogen addit