✦ LIBER ✦

Formation of CoSi2 on amorphous silicon by RTA

✍ Scribed by Gyözö Drozdy; Hannu Ronkainen; Ilkka Suni

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of iron disilicide on amorphou

✍ U. Erlesand; M. Östling; K. Bodén 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 391 KB

Formation of buried CoSi2 by ion implant

✍ K. Kohlhof; S. Mantl; B. Stritzker; W. Jäger 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 630 KB

The formation of epitaxial CoSi2 thin fi

✍ A.H. Reader; J.P.W.B. Duchateau; J.E. Crombeen; E.P. Naburgh; M.A.J. Somers 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 922 KB

Iron silicide formation on hydrogenated

✍ P. Grunow; H. Paes Jr.; C. Gatts; W. Losch 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 376 KB

Thermal stability of CoSi2 on submicron

✍ R.J. Schreutelkamp; B. Deweerdt; R. Verbeeck; K. Maex 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 438 KB

In-process control of Co silicide format

✍ J-M. Dilhac; C. Ganibal; N. Nolhier; P.B. Moynagh; C.P. Chew; P.J. Rosser 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 229 KB