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Formation of CeSi2 on the Si surface upon high current pulsed Ce-ion implantation

✍ Scribed by X.Q. Cheng; X.J. Tang; B.X. Liu


Book ID
117622220
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
246 KB
Volume
365
Category
Article
ISSN
0925-8388

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