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Formation of MoSi2 and associated fractal growth on Si surface upon high current pulsed Mo-ion implantation

โœ Scribed by X.Q. Cheng; R.S. Wang; X.J. Tang; B.X. Liu


Book ID
114167292
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
211 KB
Volume
207
Category
Article
ISSN
0168-583X

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