๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Formation of Catalytic Pd on ZnO Thin Films for Electroless Metal Deposition

โœ Scribed by Sun, R. D.


Book ID
124069723
Publisher
The Electrochemical Society
Year
1998
Tongue
English
Weight
562 KB
Volume
145
Category
Article
ISSN
0013-4651

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Evaluation of electroless deposited Co(W
โœ A. Kohn; M. Eizenberg; Y. Shacham-Diamand; B. Israel; Y. Sverdlov ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 231 KB

Electroless deposited Co(W,P) thin films were evaluated as diffusion barriers for copper metallization. Capacitance versus time measurements of MOS structures as well as SIMS depth profiles indicate that 30-nm-thick films can function as effective barriers against copper diffusion after thermal trea