Formation of atomically flat β-FeSi2/Si(100) interface using ion irradiated substrate

✍ Scribed by M. Sasase; H. Yamamoto; H. Kurata

• Book ID: 113937538
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 489 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.12.067