Synthesis of β-FeSi2 for optical applications by Fe triple-energy ion implantation into Si(100) and Si(111) substrates

✍ Scribed by Hiroshi Katsumata; Yunosuke Makita; Naoto Kobayashi; Masataka Hasegawa; Hajime Shibata; Shin-ichiro Uekusa

• Book ID: 113205328
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 418 KB
• Volume: 281-282
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(96)08645-2