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Formation of alumina fine particles by a magnetron sputtering — gas aggregation method

✍ Scribed by Goto, M.; Murakami, J.; Tai, Y.; Yoshimura, K.; Igarashi, K.; Tanemura, S.


Book ID
113044416
Publisher
Springer
Year
1997
Tongue
English
Weight
404 KB
Volume
40
Category
Article
ISSN
1434-6060

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