Formation of compositionally graded multilayer films by discharge gas flow modulation in magnetron sputtering

✍ Scribed by E. Kusano; A. Kinbara; I. Kondo

• Book ID: 117148336
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 295 KB
• Volume: 218
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(97)00133-6