Formation and Shape Transition of Nanostructures on Si(100) surfaces after MeV Sb Implantation

✍ Scribed by Soma Dey; Dipak Paramanik; V. Ganesan; Shikha Varma

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 807 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.01.049