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Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures

โœ Scribed by M. Benkerri; R. Halimi; A. Bouabellou; N. Benouattas


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
433 KB
Volume
7
Category
Article
ISSN
1369-8001

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