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Formation and Properties of Copper Silicide Precipitates in Silicon

✍ Scribed by Seibt, M. ;Griess, M. ;Istratov, A. A. ;Hedemann, H. ;Sattler, A. ;Schröter, W.


Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
396 KB
Volume
166
Category
Article
ISSN
0031-8965

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