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Formation and oxidation mechanisms in two semiconducting silicides

✍ Scribed by F.M d'Heurle


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
573 KB
Volume
151
Category
Article
ISSN
0040-6090

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Formation kinetics and composition of ti
✍ I. Montero; A. Climent-Font; J. PerriΓ¨re; D. Levy; J.M. Martinez-Duart πŸ“‚ Article πŸ“… 1993 πŸ› Elsevier Science 🌐 English βš– 465 KB

Ahstrati-The kinetics of the low temperature anodic oxidation of titanium silicide in KNO, solutions in ethylene glycol has been investigated as a function of the anodization current density. A strong influence of the anodic current density in the oxide composition, as determined by Rutherford backs