✦ LIBER ✦

Formation and characterization of nanometer scale metal-oxide-semiconductor structures on GaAs using low-temperature atomic layer deposition

✍ Scribed by Ye, P. D.; Wilk, G. D.; Tois, E. E.; Wang, Jian Jim

Book ID: 120586079
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 338 KB
Volume: 87
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1954902

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low-Temperature Silicon Oxide Offset Spa

Low-Temperature Silicon Oxide Offset Spacer Using Plasma-Enhanced Atomic Layer Deposition for High- k /Metal Gate Transistor

✍ Murata, Tatsunori; Miyagawa, Yoshihiro; Nishida, Yukio; Yamamoto, Yoshiki; Yamas 📂 Article 📅 2010 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 355 KB

Fabrication and characterization of meta

Fabrication and characterization of metal/insulator/semiconductor structures based on TiO2and TiO2/SiO2thin films prepared by low-temperature arc vapor deposition

✍ Shubham, Kumar; Chakrabarti, P. 📂 Article 📅 2014 🏛 The Korean Institute of Metals and Materials 🌐 English ⚖ 496 KB

Self-limiting growth of ZnO films on (0&

Self-limiting growth of ZnO films on (0 0 0 1) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide

✍ Yen-Ting Lin; Ping-Han Chung; Hung-Wei Lai; Hsin-Lun Su; Dong-Yuan Lyu; Kuo-Yi Y 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 338 KB

Oxygen interaction of CdS-based gas sens

Oxygen interaction of CdS-based gas sensors with different stoichiometric compositions was studied by X-ray photoelectron spectroscopy (XPS) and thermal-desorption mass spectroscopy observations combined with conductivity measurements. Three different types of film with different atomic ratios of Cd/S were used in the study of oxygen chemisorption in a low-temperature range between 300 and 570 K. Spray pyrolysis was used for the deposition of the films on glass substrates; XPS and energy dispersive spectroscopy of X-ray together with atomic force microscopy and scanning electron microscopy were used for the characterization of the composition and structure of the films. It was possible to distinguish different temperature ranges for the thermal desorption of the different adsorbed oxygen species. A comparison of the data from XPS and mass-spectroscopy observations with conductance measurements allows to conclude that metallic surface atoms are responsible for different interactions of oxygen species with CdS surfaces.

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 379 KB