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Focussed ion beam induced damage in silicon studied by scanning capacitance microscopy

✍ Scribed by Brezna, W; Wanzenb ck, H; Lugstein, A; Bertagnolli, E; Gornik, E; Smoliner, J

Book ID
120549851
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
165 KB
Volume
18
Category
Article
ISSN
0268-1242

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