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Flux Dependence of Damage Accumulation in Silicon during Ion Bombardment

✍ Scribed by Holldack, K. ;Kerkow, H.

Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 410 KB
Volume: 98
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210980225

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