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Flow pattern defects in germanium-doped Czochralski silicon crystals

✍ Scribed by Wubing Xu; Jiahe Chen; Xiangyang Ma; Deren Yang; Longfei Gong; Daxi Tian


Publisher
Springer
Year
2010
Tongue
English
Weight
842 KB
Volume
104
Category
Article
ISSN
1432-0630

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