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Flash lamp annealing with millisecond pulses for ultra-shallow boron profiles in silicon

✍ Scribed by T Gebel; M Voelskow; W Skorupa; G Mannino; V Privitera; F Priolo; E Napolitani; A Carnera

Book ID: 114165185
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 181 KB
Volume: 186
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00900-4

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