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Flame spray synthesis of ZrO2 nano-particles using liquid precursors

✍ Scribed by A.I.Y. Tok; F.Y.C. Boey; S.W. Du; B.K. Wong

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
407 KB
Volume
130
Category
Article
ISSN
0921-5107

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Thin films of ZrO 2 have been deposited by liquid injection MOCVD and ALD using the cyclopentadienyl-based Zr precursors [(MeCp) 2 ZrMe (OMe)] and [(MeCp) 2 ZrMe(OBu t )]. Analysis by X-ray diffraction showed that films grown at low temperature (300 Β°C) by ALD were amorphous, whist films deposited a