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Fine structure investigations of diamond and diamond-like carbon films using Raman spectroscopy

✍ Scribed by Abello, L.; Lucazeau, G.; André, B.; Priem, Th.


Book ID
122485376
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
592 KB
Volume
1
Category
Article
ISSN
0925-9635

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Thickness dependence of the structure of
✍ Fan-Xin Liu; Zhen-Lin Wang 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 610 KB

The thickness dependence on structure of Diamond-like carbon films of a-C:H deposited by ECR-CVD and ta-C by FCVA has been studied by visible and UV Raman spectroscopy. The results show that the evolution of structure as a function of the thickness for a-C:H films contains two stages: when thickness