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Structure of hydrogenated diamond like carbon by Micro-Raman spectroscopy

โœ Scribed by Jagannath Datta; Nihar R. Ray; Pintu Sen; Hari S. Biswas; Erwin A. Vogler

Book ID
113795377
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
588 KB
Volume
71
Category
Article
ISSN
0167-577X

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Thickness dependence of the structure of
Thickness dependence of the structure of diamond-like carbon films by Raman spectroscopy
โœ Fan-Xin Liu; Zhen-Lin Wang ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 610 KB

The thickness dependence on structure of Diamond-like carbon films of a-C:H deposited by ECR-CVD and ta-C by FCVA has been studied by visible and UV Raman spectroscopy. The results show that the evolution of structure as a function of the thickness for a-C:H films contains two stages: when thickness