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Fine pattern fabrication on glass surface by imprint lithography

โœ Scribed by Y. Hirai; K. Kanakugi; T. Yamaguchi; K. Yao; S. Kitagawa; Y. Tanaka

Book ID
114155520
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
748 KB
Volume
67-68
Category
Article
ISSN
0167-9317

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We present a study of poly methyl methacrylate (PMMA) mechanical recoveries observed in the center of micro-scale structures replicated by nanoimprint lithography. Atomic force microscopy statistical analysis clearly reveals that the height and width of recoveries increase with the imprint force unt