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Film characterization of titanium oxide films prepared by high-power impulse magnetron sputtering

โœ Scribed by F.J. Jing; K. Yukimura; H. Kato; Y.F. Lei; T.X. You; Y.X. Leng; N. Huang


Book ID
113919494
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
696 KB
Volume
206
Category
Article
ISSN
0257-8972

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