𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Field ion microscope and atom-probe analysis of Ni overlayers on thin films of Rh2O3

✍ Scribed by G.L. Kellogg


Book ID
104197949
Publisher
Elsevier Science
Year
1991
Weight
72 KB
Volume
257
Category
Article
ISSN
0167-2584

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Atomic layer deposition of Cr2O3 thin fi
✍ Aivar Tarre; Jaan Aarik; Hugo MΓ€ndar; Ahti Niilisk; Rainer PΓ€rna; Raul Rammula; πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 616 KB

Atomic layer deposition of Cr 2 O 3 thin films from CrO 2 Cl 2 and CH 3 OH on amorphous SiO 2 and crystalline Si(1 0 0) and a-Al 2 O 3 (1 1 0 2) substrates was investigated, and properties of the films were ascertained. Self-limited growth with a rate of 0.05-0.1 nm/cycle was obtained at substrate t