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Features of TiN film deposition by the vacuum-arc method

โœ Scribed by Khamdokhov, A. Z.; Teshev, R. Sh.; Khamdokhov, Z. M.; Kulikauskas, V. S.; Chernykh, P. N.

Book ID
121405487
Publisher
Pleiades Publishing
Year
2013
Tongue
English
Weight
359 KB
Volume
7
Category
Article
ISSN
1027-4510

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TiO 2 in anatase crystalline structure has strong photocatalysis. In this paper, TiO 2 films are deposited on sodaglass substrate using a Ti cathode vacuum arc with O 2 flow. Experimental conditions are as follows: arc current, 50 A; pressure, 0.3 and 1.0 Pa; O 2 flow rate, 20 ml/min; cathode substr