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Features of the structure of a porous silicon carbide layer obtained by electrochemical etching of a 6H-SiC substrate

✍ Scribed by L. M. Sorokin; N. S. Savkina; V. B. Shuman; A. A. Lebedev; G. N. Mosina; G. Hutchison


Book ID
110133065
Publisher
SP MAIK Nauka/Interperiodica
Year
2002
Tongue
English
Weight
250 KB
Volume
28
Category
Article
ISSN
1063-7850

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