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Features and mechanisms of growth of cubic silicon carbide films on silicon

โœ Scribed by L. K. Orlov; E. A. Steinman; T. N. Smyslova; N. L. Ivina; A. N. Tereshchenko


Book ID
114992543
Publisher
SP MAIK Nauka/Interperiodica
Year
2012
Tongue
English
Weight
288 KB
Volume
54
Category
Article
ISSN
1063-7834

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